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2007
Journal Article
Title
Hohe Produktivität durch Laser-Arc-Technologie - Superharte Kohlenstoffschichten in der Serie
Other Title
High productivity with laser-arc technology: Super-hard carbon layer in series
Abstract
Until now, the appropriate technology for the industrial precipitation of super-hard Carbon layer has been missing. A new model for fitting in an industrial PVD installation is developed, which offers the precipitation of Carbon layers with laser-arc technology. The productivity is the same with the classic hard material precipitation facilities.
Language
German