Hochgenaue Spindelfeinstellung an Mikrobearbeitungsmaschinen

Five axis micromachining has, due to many different tools and materials, a demand for a very broad spectrum of revolution speeds. Due to this, several types of tool spindles with varying tool holding systems have to be mounted on the high precision machine tool. With this, severe positioning errors are incorporated. In this work the occurring geometrical positioning errors are analysed and their effects on microcutting are shown. To compensate the errors, different models have been investigated and two promising principles have been established. For a fast tool spindle change a fixed position loading system with very precise spindle holders, without the need to use fine adjustment elements, is proposed. The second alternative is a precision adjustment system using flexures that are frictionless and free from backlash. Here, the spindle is adjusted after every installation.