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  4. Multilayer Terahertz Imaging at Kilohertz Pixel Rate
 
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2022
Conference Paper
Title

Multilayer Terahertz Imaging at Kilohertz Pixel Rate

Abstract
We present our recent results on multilayer terahertz imaging at 1.6 kHz pixel rate employing an ECOPS (electronically controlled optical sampling) based terahertz time-domain spectroscopy system. Using a rotating sample and a translating measurement head, we image individual layer thicknesses on metallic and nonmetallic disks of 300 mm diameter in less than 3 minutes.
Author(s)
Molter, Daniel  
Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM  
Ellenberger, Kim-Sophie
Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM  
Klier, Jens  
Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM  
Duran, Stefan
Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM  
Jonuscheit, Joachim  
Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM  
Freymann, Georg von  
Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM  
Vieweg, Nico
Deninger, Anselm
Mainwork
47th International Conference on Infrared, Millimeter and Terahertz Waves, IRMMW-THz 2022  
Conference
International Conference on Infrared, Millimeter and Terahertz Waves 2022  
DOI
10.1109/IRMMW-THz50927.2022.9896014
Language
English
Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM  
Keyword(s)
  • multilayers

  • terahertz spectroscopy

  • terahertz wave imaging

  • terahertz wave spectra

  • thickness measurement

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