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Reactive sputter deposition of tungsten nitride thin films
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2002
Journal Article
Title
Reactive sputter deposition of tungsten nitride thin films
Author(s)
Baker, C.
Shah, S.I.
Journal
Journal of vacuum science and technology A. Vacuum, surfaces and films
DOI
10.1116/1.1498278
Language
English
Fraunhofer-Institut für Fertigungstechnik und Angewandte Materialforschung IFAM
