Closed-loop synchronization scheme of resonant MOEMS-mirrors with two axes

We have developed compact devices comprising optical position sensing and driver electronics with closed loop control, capable of driving resonant 1D-and 2D-MOEMS scanner mirrors. Position encoding is realized by measuring a laser beam reflected from the backside of the mirror. In the 2D-device we use cylindrical mirrors in order to suppress the deflection of the orthogonal dimension. This reduces the problem to the control of two independent 1D-oscillations and allows accurate position sensing. The phase between the oscillations of the two orthogonal axes is actively controlled to achieve a stable Lissajous figure. In this contribution we also demonstrate that this approach is scalable for synchronization of separate MEMS mirrors.