Towards the Modeling and Control of a Quasi-Static 2D-MEMS Vector Scanner with a Hybrid-Integrated Moving Magnet Drive

Monocrystalline silicon-based quasi-static 2D-MEMS vector scanners are classified as micro-opto-electro-mechanical systems (MOEMS). These controllable micromirrors are primarily utilized for the precise and dynamic deflection of laser beams in applications such as light detection and ranging (LiDAR), optical coherence tomography (OCT), and compact therapeutic laser systems. While system integration can be difficult, the use of hybrid-integrated electromagnetic (EM) drives—including moving magnet types—yields high energy densities and require lower driving voltages than those seen in conventional monolithically integrated electrostatic drives, thus facilitating innovative design options for MOEMS. This work presents an approach for the modeling and control of a quasi-static gimbal-based 2D-MEMS vector scanner with a hybrid-integrated moving magnet drive. A general procedure for the static and dynamic characterization of the system is provided. Furthermore, the performance of the proposed control system is evaluated using a set of non-resonant vectorial scan trajectories. The results demonstrate that the system can be accurately controlled for a 5 mm mirror aperture and large quasi-static tilt angles of ±13^◦ on both scan axes, a significant finding that indicates the potential of compact MOEMS scanning systems with hybrid-integrated EM drives for broader application in fields requiring precise vectorial control of laser beams.