Quality control of ultra-microelectrode arrays using cyclic voltammetry, electrochemical impedance spectroscopy and scanning electrochemical microscopy

Miniaturised amperometric transducers have been realised on silicon wafers integrating a disk ultra-microelectrode array as working electrodes, a large counter electrode and a Ag/AgCl pseudo reference electrode in a three-electrode configuration. Cyclic voltammetry (CV), electrochemical impedance spectroscopy (EIS) and scanning electrochemical microscopy (SECM) have been evaluated as tools for rapid on-wafer determination of characteristic device parameters.