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  4. Modeling and model-based control of temperature in an SThM probe
 
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2015
Conference Paper
Title

Modeling and model-based control of temperature in an SThM probe

Abstract
We present a multi-scale model of a probe for scanning thermal microscopy. The probe is built by microfabrication techniques. In active mode, it is supplied by a source of harmonic and/or continuous current and the tip temperature is measured after a lock-in amplifier. The model distinguishes two time scales and two space scales. Simulation results show the potential of the model in terms of accuracy and computation speed and they are compared to experimental results. Finally, a temperature control law constructed from this model is stated.
Author(s)
Lenczner, M.
Yang, Bin
Abaidi, M.
Bontempi, A.
Teyssieux, D.
Koehler, B.
Janus, P.
Mainwork
16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015  
Conference
International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) 2015  
DOI
10.1109/EuroSimE.2015.7103117
Language
English
Fraunhofer-Institut für Zerstörungsfreie Prüfverfahren IZFP  
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