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Scaling up integration of carbon nanotubes into Micro-Electro-Mechanical systems
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2018
Conference Paper
Title
Scaling up integration of carbon nanotubes into Micro-Electro-Mechanical systems
Author(s)
Böttger, Simon
Jöhrmann, N.
Bonitz, Jens
Wunderle, Bernhard
Schulz, Stefan E.
Hermann, Sascha
Mainwork
Smart Systems Integration 2018. International Conference and Exhibition on Integration Issues of Miniaturized Systems
Conference
International Conference and Exhibition on Integration Issues of Miniaturized Systems 2018
Smart Systems Integration Conference 2018
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
