2000
Conference Paper
Title

Combination of metal oxyde based gas sensors with CMOS electronic circuits on wafer level

Author(s)
Roetsch, P.
Böttner, H.
Fraunhofer-Institut für Photonische Mikrosysteme IPMS  
Seibert, K.
Götz, A.
Gracia, I.
Plaza, J.A.
Cane, C.
Fraunhofer-Institut für Physikalische Messtechnik IPM  
Mainwork
Conference
Language
English