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A resonance PLL-based tracking system for capacitive sensors - MEMS/NEMS
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2010
Conference Paper
Title
A resonance PLL-based tracking system for capacitive sensors - MEMS/NEMS
Author(s)
Wiegand, C.
Hangmann, C.
Hedayat, Christian
Hilleringmann, Ulrich
Mainwork
Smart systems integration 2010. 4th European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components. CD-ROM
Conference
European Conference & Exhibition on Integration Issues of Miniaturized Systems - MEMS, MOEMS, ICs and Electronic Components 2010
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
