Particle detection in the barrier layer production

Even under ideal process conditions particles can cause weak barrier functionality through defects in the layers. - Particles are generated during manufacturing and processing of substrate materials. - Particle-free confectioning of substrate material would be ideal but is not available in the market presently. However, the knowledge for suitable equipment design is available. - For reliable process control and quality assurance an effective detection of particles is necessary. This should also be possible in-line. - A new particle scanner with high sensitivity and very short measurement time has been developed.