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Pulsed magnetron sputter technology
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1993
Journal Article
Title
Pulsed magnetron sputter technology
Author(s)
Schiller, S.
Goedicke, K.
Reschke, J.
Kirchhoff, V.
Schneider, S.
Milde, F.
Journal
Surface and coatings technology
Conference
International Conference on Metallurgical Coatings and Thin Films 1993
DOI
10.1016/0257-8972(93)90248-M
Language
English
Fraunhofer-Institut für Elektronenstrahl- und Plasmatechnik FEP
