Manufacturing of micro fluidic moulds by combining micro milling and laser structuring

Increasing demands regarding the functionality and the functional density of micro fluidic systems require constant miniaturisation of single components and also of the complete system. A cost efficient and effective manufacturing process requires replication processes such as injection moulding or hot embossing to structure disposables cost-effectively. This paper presents the development of the sequential process combination of laser micro structuring and micro milling for the manufacturing of micro fluidic moulds.