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Micromirror Array of Monocrystalline Silicon
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2006
Conference Paper
Title
Micromirror Array of Monocrystalline Silicon
Author(s)
Bakke, T.
Völker, B.
Friedrichs, M.
Rudloff, D.
Mainwork
IEEE/LEOS International Conference on Optical MEMS and their Applications 2006. CD-ROM
Conference
International Conference on Optical MEMS and their Applications 2006
DOI
10.1109/OMEMS.2006.1708298
Language
English
Fraunhofer-Institut für Photonische Mikrosysteme IPMS
