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Fabrication of hierarchical structures by direct laser writing and multi-beam-interference
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2013
Conference Paper
Title
Fabrication of hierarchical structures by direct laser writing and multi-beam-interference
Author(s)
Steger, M.
Hartmann, C.
Beckemper, S.
Holtkamp, J.
Gillner, A.
Mainwork
LAMP 2013, 6th International Congress on Laser Advanced Materials Processing
Conference
International Congress on Laser Advanced Materials Processing (LAMP) 2013
International Symposium on Laser Precision Microfabrication (LPM) 2013
International Symposium on High Power Laser Processing (HPL) 2013
Language
English
Fraunhofer-Institut für Lasertechnik ILT
