2015
Journal Article
Title

Materials for Advanced Metallization 2014 (MAM 2014). Preface

Title Supplement
A Microelectronic Engineering open special focused issue including selected papers from the 23rd European Workshop on Materials for Advanced Metallization 2014, Chemnitz, Germany, March 2-5, 2014
Author(s)
Schulz, Stefan E.  
Hecker, M.
Korner, H.
Wolf, H.
Journal
Conference
DOI
Language
English