2018
Book Article
Title

Methods of vacuum arc deposition of ta-C films

Abstract
Vacuum arc discharges yield plasmas with usually complete ionization, high energy of the ions and high ion currents.
Author(s)
Schultrich, Bernd  
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
Mainwork
DOI
Language
English