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  4. Kilohertz Pixel-Rate Multilayer Terahertz Imaging of Subwavelength Coatings
 
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2022
Journal Article
Title

Kilohertz Pixel-Rate Multilayer Terahertz Imaging of Subwavelength Coatings

Abstract
The acquisition speed of terahertz time-domain spectroscopy systems has undergone a significant improvement in recent years. With the development of dual-laser-based sampling techniques such as ASOPS or ECOPS, waveform acquisition rates in the kilohertz range have become feasible. Here, we present measurements of sub-wavelength layers in multilayer systems at a rate of 1.6 kHz, where the individual layer thicknesses are analyzed in real time. For demonstration, we image layers on metallic and non-metallic disks with a 300 mm diameter, acquiring 240 000 pixels in only 2.5 min. By combining a rotation of the samples with a linear translation of the measurement head, we maximize the measurement yield. Owing to a “single-shot” (625 µs) dynamic range of 40 dB and a bandwidth above 3 THz of the ECOPS system, we achieve sub-micron repeatability for each layer.
Author(s)
Molter, Daniel  
Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM  
Ellenberger, Kim-Sophie
Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM  
Klier, Jens  
Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM  
Duran, Stefan
Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM  
Jonuscheit, Joachim  
Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM  
Freymann, Georg von  
Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM  
Vieweg, N.
TOPTICA Photonics AG
Deninger, A.
TOPTICA Photonics AG
Journal
Applied Sciences  
Open Access
DOI
10.3390/app12104964
Language
English
Fraunhofer-Institut für Techno- und Wirtschaftsmathematik ITWM  
Keyword(s)
  • ECOPS

  • layer thickness measurement

  • optical sampling

  • terahertz

  • terahertz imaging

  • ultrafast terahertz measurements

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