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Thermal and electrical simulation of deep submicron interconnection systems
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2002
Conference Paper
Title
Thermal and electrical simulation of deep submicron interconnection systems
Author(s)
Streiter, R.
Wolf, H.
Zhu, Z.
Xiao, X.
Gessner, T.
Mainwork
Advanced Metallization Conference, AMC 2001
Conference
Advanced Metallization Conference (AMC) 2001
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
