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2011
Presentation
Title
Virtual equipment. A test bench for virtual metrology algorithms
Title Supplement
Presentation held at ERIC Conference 2011, Leixlip, October 12th 2011
Abstract
A "virtual equipment" is presented which serves as a test bench for virtual metrology algorithms (VM). Statistical modifications and predictions based on fab history data are used alongside physical simulation to generate test data sets for various common and uncommon states of the processing equipment. These data sets are used to feed and compare the results of different VM algorithms and analyse their sensitivity and measurement capability.