Temperature Control of Metal Strip during High-Rate Vacuum Coating
Electron beam evaporation with deposition rates of hundredsof nanometer per second is predestined to fit large throughput.In a few cases, high-rate vacuum depositions demandeffective cooling of the substrate to exploit their potential,otherwise substrate or layer temperature represents a limitingfactor. That is why a new kind of cooling equipment formetal strip vacuum coating was developed. As a result, thepractical realized heat transfer coefficient was increased from50 W/m2K for common cooling drums up to 1000 W/m2K. Thedemonstrated heat transfer coefficients describe a distinctiveperformance increase compared to known state of the art. Forthe first time, a 10 mm aluminum high-rate deposition wasrealized without any alloying with steel strip. Extensionsconcerning the deposition rate or deposition of thick layersonto thin metal foils become feasible.