Behavioral modeling languages can be used in different steps of top-down design and bottom-up verification of MEMS design. The available language facilities of VHDLAMS and the requirements of the applied methods in this process are confronted. Especially the application of Kirchhoffian networks to model 3D movements is taken into account. The decisions that should be done at the beginning of the modeling process are discussed. This is especially important if models from different sources shall be combined later on. Experiences using available simulation engines are presented. A micro mechanical accelerometer and an electrostatic beam actuator are investigated. Therefore a set of basic elements for MEMS simulation was created.