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Investigations into the wear of a WL10 ion source
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2005
Conference Paper
Title
Investigations into the wear of a WL10 ion source
Author(s)
Häublein, V.
Sadrawetz, S.
Frey, L.
Martinz, H.-P.
Ryssel, H.
Mainwork
Ion implantation technology. Proceedings of the 15th International Conference on Ion Implantation Technology 2004
Conference
International Conference on Ion Implantation Technology (IIT) 2004
DOI
10.1016/j.nimb.2005.05.011
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB
