Thin composite layers (tin in plasma polymer matrix) were prepared in a stainless steel vacuum chamber. An RF powered magnetron with tin target was used to excite the discharge and to activate the monomer species (n-hexane). The gas mixture introduced comprised At and n-hexane vapours. The properties of the films and chemical composition were characterized by AFM (surface morphology), TEM and Electron tomography (bulk structure characterization), XPS and FTIR spectroscopy (chemical composition analyses). Current-voltage characteristics were measured to examine the electrical properties of the layers and their dependence on the deposition parameters.
