2005
Conference Paper
Title

Drift free, highly planar silicon micromirror arrays

Abstract
Simple monocrystalline silicon micromirror arrays have been fabricated using a CMOS compatible tungsten plug process. Mirror planarity and pre-deflection was characterized. It was found that the properties of these mirrors are superior to those previously made of aluminum.
Author(s)
Völker, B.
Friedrichs, M.
Rudloff, D.
Bakke, T.
Mainwork
Conference
Language
English
Keyword(s)