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Correlation of reduced oxygen content in precursors with improved MOVPE layer quality
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2003
Journal Article
Titel
Correlation of reduced oxygen content in precursors with improved MOVPE layer quality
Author(s)
Rushworth, S.A.
Smith, L.M.
Ravetz, M.S.
Coward, K.M.
Odedra, R.
Kanjolia, R.
Bland, S.W.
Dimroth, F.
Bett, A.W.
Zeitschrift
Journal of Crystal Growth
DOI
10.1016/S0022-0248(02)01820-1
Language
English
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Fraunhofer-Institut für Solare Energiesysteme ISE
Tags
Epitaxie
Epitaxie MOVPE