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  4. Correlation of reduced oxygen content in precursors with improved MOVPE layer quality
 
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2003
Journal Article
Title

Correlation of reduced oxygen content in precursors with improved MOVPE layer quality

Author(s)
Rushworth, S.A.
Smith, L.M.
Ravetz, M.S.
Coward, K.M.
Odedra, R.
Kanjolia, R.
Bland, S.W.
Dimroth, Frank  
Bett, Andreas W.  
Journal
Journal of Crystal Growth  
DOI
10.1016/S0022-0248(02)01820-1
Language
English
Fraunhofer-Institut für Solare Energiesysteme ISE  
Keyword(s)
  • Epitaxie

  • Epitaxie MOVPE

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