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Correlation of reduced oxygen content in precursors with improved MOVPE layer quality
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2003
Journal Article
Title
Correlation of reduced oxygen content in precursors with improved MOVPE layer quality
Author(s)
Rushworth, S.A.
Smith, L.M.
Ravetz, M.S.
Coward, K.M.
Odedra, R.
Kanjolia, R.
Bland, S.W.
Dimroth, Frank
Bett, Andreas W.
Journal
Journal of Crystal Growth
DOI
10.1016/S0022-0248(02)01820-1
Language
English
Fraunhofer-Institut für Solare Energiesysteme ISE
Keyword(s)
Epitaxie
Epitaxie MOVPE