English
Deutsch
Log In
Log in with Fraunhofer Smartcard
Password Login
Research Outputs
Fundings & Projects
Researchers
Institutes
Statistics
Fraunhofer-Gesellschaft
Home
Fraunhofer-Gesellschaft
Konferenzschrift
Monolithic integration of vibration sensors in near surface bulk silicon micromachining with microelectronics
Details
Full
Export
Statistics
Options
Show all metadata (technical view)
2001
Conference Paper
Title
Monolithic integration of vibration sensors in near surface bulk silicon micromachining with microelectronics
Author(s)
Steiniger, D.
Bertz, A.
Gessner, T.
Mainwork
Micro System Technologies 2001
Conference
International Conference on Micro-, Electro-, Opto-, Mechanical Systems and Components 2001
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM
