2015
Conference Paper
Title

Measuring position and figure deviation of freeform mirrors with computer generated holograms

Abstract
A novel interferometric metrology using a multi-zone computer generated hologram for determining position and figure deviations of two anamorphic aspherical mirrors arranged on a common substrate is presented.
Author(s)
Beier, M.
Stumpf, D.
Zeitner, U.D.
Gebhardt, A.
Hartung, J.
Risse, S.
Eberhardt, R.
Gross, H.
Tünnermann, A.
Mainwork
Conference
DOI
Language
English