The opportunities to combine electronic functions at high temperature

In this talk a short introduction into CMOS on SIMOX technology will be given. As an example for the advantages of this technology the temperature behaviour of the CMOS devices and the basic digital cells will be shown. In addition to the improved temperature behaviour of the CMOS devices the SIMOX technology opens the route to realize new sensor concepts. The enhanced process flexibility will be demonstrated by a flow sensor and a piezoresistive pressure sensor which can operate at high temperatures. The monolithic integration of a piezoresistive sensor and a CMOS readout circuit to a programmable sensor system will demonstrate the possibilities in the field of high temperature electronics.