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Dispersion Preparation for Wafer-Level Liquid Processing of Carbon Nanotube Microsensors
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2014
Conference Paper
Title
Dispersion Preparation for Wafer-Level Liquid Processing of Carbon Nanotube Microsensors
Author(s)
Hille, Toni
Blaudeck, Thomas
Hermann, Sascha
Schulz, Stefan E.
Mainwork
12. Chemnitzer Fachtagung Mikrosystemtechnik 2014. Mikromechanik & Mikroelektronik. CD-ROM
Conference
Chemnitzer Fachtagung Mikrosystemtechnik 2014
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS
