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2012
Journal Article
Title
Factory integration
Other Title
Integration in die Fertigung
Abstract
Factory Integration (FI) is one of the key sections of the International Technology Roadmap for Semiconductor (ITRS) that strives to integrate all the factory components in order to efficiently produce the required products in the right volumes on schedule while meeting cost targets. To keep up with the Moore's Law, it is paramount to sustain the decades-long trend of 30 percent per year reduction in cost per function, which requires capturing all possible factory cost reduction opportunities.