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2012
Journal Article
Title

Factory integration

Other Title
Integration in die Fertigung
Abstract
Factory Integration (FI) is one of the key sections of the International Technology Roadmap for Semiconductor (ITRS) that strives to integrate all the factory components in order to efficiently produce the required products in the right volumes on schedule while meeting cost targets. To keep up with the Moore's Law, it is paramount to sustain the decades-long trend of 30 percent per year reduction in cost per function, which requires capturing all possible factory cost reduction opportunities.
Author(s)
Oechsner, Richard  
Journal
Future fab international  
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Keyword(s)
  • ITRS

  • technical working group factory integration

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