1995
Conference Paper
Title

Surface micromachined accelerometer with increased working capacitance and force feedback operation

Title Supplement
Vortrag.
Author(s)
Wenk, B.
Ramos-Martos, J.
Fehrenback, M.
Lange, P.
Offenberg, M.
Riethmüller, W.
Mainwork
Conference
Language
English