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Field emitting carbon nanotubes in MEMS-structures for movement sensors
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2012
Conference Paper
Title
Field emitting carbon nanotubes in MEMS-structures for movement sensors
Author(s)
Loschek, S.
Hermann, Sascha
Haibo, Y.
Schulz, Stefan E.
Mainwork
Mikro-System-Technik Chemnitz 2012. Mikromechanik & Mikroelektronik
Conference
Chemnitzer Fachtagung Mikromechanik und Mikroelektronik 2012
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS