Large lightweight segmented mirrors for adaptive optics

This paper examines the possibility of constructing deformable mirrors for adaptive optics with a large number of degrees of freedom, by assembling segmented silicon mirrors with bimorph piezoelectric actuation. The production process relies on silicon wafers and thick film PZT deposition technology; it is able to lead to an actuation pitch of the order of 5 mm, and the manufacturing costs appear to grow only slowly (linearly or less) with the number of degrees of freedom in the adaptive optics.