Prozessnahe Geometrievermessung von Mikrostrukturen in Höchstpräzisionsbearbeitungsmaschinen

The objective target of this diploma thesis was the measurement of work pieces in the work-ing area of a micromachining machine. The tactile measurement methods, that are used so far in the working area can't be used for the measurement of micro geometry elements because of the emerging touching forces and the size of the tactile scanning element. After experimenting on teststructures, analysing the micro components and because of the physical principles of non-contact measuring sensors, confocal laser sensors demonstrated the most significant measurement results. A profil was measured by recording separate measurement points along a section of measurements. The gained measurement results can be evaluated graphically as a profile or (if several parallel lines are measured) as a three-dimensional image. By evaluating a worked on microstructured component in the machine it is possible to influence the editing quality of the work piece in a following step of editing.