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Microfriction and microwear AFM experiments on metal containing amorphous hydrocarbon hard coatings
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1998
Conference Paper
Title
Microfriction and microwear AFM experiments on metal containing amorphous hydrocarbon hard coatings
Title Supplement
Mechanisms, models and micro- vs. macrotests
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Author(s)
Schiffmann, K.I.
Mainwork
Tribology issues and opportunities in MEMS. Proceedings of the NSF/AFOSR/ASME Workshop
Conference
Workshop on Tribology Issues and Opportunities in MEMS 1997
Language
English
Fraunhofer-Institut für Schicht- und Oberflächentechnik IST
