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1987
Conference Paper
Title
Self-aligned low-loss totally reflecting waveguide mirrors in InGaAsP/InP
Abstract
The authors report on the design, fabrication and performance of totally reflecting waveguide mirrors for a 90 degrees directional change of monomode rib waveguides in the InGaAsP/InP material system. The precise lateral position and angular orientation of the mirror relative to the waveguides is ensured to a high degree by employing a self-aligning method. Waveguide mirrors etched by RIE in a CH4/H2 plasma show an average loss of only 1.5 dB each for 4 and 8 devices in series.
Language
English
Keyword(s)