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Formation and contact properties of titanium-silicided shallow junctions
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1991
Journal Article
Title
Formation and contact properties of titanium-silicided shallow junctions
Author(s)
Dehm, C.
Gyulai, J.
Ryssel, H.
Journal
Applied surface science
Conference
European Workshop on Refractory Metals and Silicides 1991
DOI
10.1016/0169-4332(91)90280-W
Language
English
IIS-B