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Exploring microsystems - measurement and test in fabrication and R&D
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2009
Journal Article
Title
Exploring microsystems - measurement and test in fabrication and R&D
Author(s)
Kurth, Steffen
Faust, W.
Specht, H.
Meinig, Marco
Fernholz, G.
Journal
MST News
Language
English
Fraunhofer-Institut für Elektronische Nanosysteme ENAS