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  4. Verification of grain boundaries in annealed thin ZrO2 films by electrical AFM technique
 
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2007
Poster
Title

Verification of grain boundaries in annealed thin ZrO2 films by electrical AFM technique

Title Supplement
Poster at E-MRS Fall Meeting, September 17-21 2007, Warsaw
Author(s)
Yanev, V.
Paskaleva, A.
Weinreich, W.
Lemberger, M.
Petersen, S.
Rommel, Mathias  orcid-logo
Bauer, A.J.
Ryssel, H.
Conference
Symposium J "Microscopy and Spectroscopy Techniques in Advanced Materials Characterization" 2007  
European Materials Research Society (Fall Meeting) 2007  
File(s)
Download (680 KB)
Rights
Use according to copyright law
DOI
10.24406/publica-fhg-356996
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB  
Keyword(s)
  • AFM

  • TEM

  • TUNA

  • high-k dielectric

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