MEMS based laser scanning microscope for endoscopic use

A miniaturized MEMS scanning microscope is presented, which enables endoscopic imaging for medical, biological and technical purposes. It consists of an optical head of only 8 mm diameter that is coupled via optical fibers and wires to a distant unit containing optics and electronics for microscope control and data processing. A PC or notebook is completing the system, acting as user interface, image display and storage. The microscope uses a focused flying laser spot allowing a resolution of about 15 um within the focus plane. This enables new endoscopic applications as in-vivo investigation of cancer-suspicious tissues in medicine.