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Simulation of proximity printing
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2011
Doctoral Thesis
Title
Simulation of proximity printing
Other Title
Simulation der Nahfeldbelichtung
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Thesis Note
Zugl.: Erlangen-Nürnberg, Univ., Diss., 2010
Author(s)
Meliorisz, P.B.
Publisher
Shaker
Publishing Place
Aachen
Language
English
Fraunhofer-Institut für Integrierte Systeme und Bauelementetechnologie IISB