1994
Journal Article
Title

Antiresonant reflecting optical waveguides in strip configuration

Abstract
A monomode antiresonant reflecting optical strip waveguide has been realized in SiON/SiO2/Si. The lateral confinement is provided by strip-loaded reflectors fabricated by e-beam direct writing and reactive ion beam etching (RIBE).
Author(s)
Gehler, J.
Bräuer, A.
Karthe, W.
Journal
Open Access
DOI
Additional link
Language
English
Keyword(s)