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  4. Combining inorganic and organic gas sensor elements: a new approach for multi-component sensing
 
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1999
Journal Article
Title

Combining inorganic and organic gas sensor elements: a new approach for multi-component sensing

Abstract
Atmospheric dependent, gas sensitive resistors seem to be good candidates for detecting critical air pollution levels. Great progress has been made in the development of various sensor types, but less attention seems to be paid to the integration of sensor elements with different characteristics. The aim of this international project is to develop a smart hybrid gas multi-sensor module for environmental applications, i.e., by combining classical thick- and thin-film elements with polymer-film based sensors and also a signal processing ASIC within a single package, which should be useful for all sensor types. The module can be used for multi-sensor operation when connected to an intelligent signal-processing unit.
Author(s)
Harsanyi, G.
Reczey, M.
Dobay, R.
Lepsenyi, I.
Illyefalvi-Vitez, Z.
Steen, J. van den
Vervaet, A.
Reinert, W.
Urbancik, J.
Guljajev, A.
Visy, C.
Inzelt, G.
Barsony, I.
Journal
Sensor review  
DOI
10.1108/02602289910266287
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT  
Keyword(s)
  • air pollution measurement

  • gas sensor

  • signal processing

  • thick film devices

  • thin film devices

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