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  4. Ein verbessertes SO2 Sensorsystem auf der Basis von SAW und IDK Elementen
 
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1995
Conference Paper
Title

Ein verbessertes SO2 Sensorsystem auf der Basis von SAW und IDK Elementen

Abstract
Applying new transducer principles on well known indicator materials improves the performance of the whole system, especially the humidity interference. A well known SO2-sensitive material (heteropolysiloxane, NND)/PTMS) was tested with a SAW ( Surface Acoustic Wave, STW Surface Transverse Wave Mode) transducer and an IDC (Interdigital Capacitor) device. Due to a different relative sensitivity of the coated IDC and SAW devices to SO2 and humidity, we were able to reduce the overall cross-sensitivity of the system to humidity significantly. The combination of these two different types of transducers, in case of need extended with other transducers, increases the performance of the sensor system.
Author(s)
Leidl, A.
Hartinger, R.
Roth, M.
Endres, H.-E.
Mainwork
2. Dresdener Sensor-Symposium 1995. Tagungshandbuch  
Conference
Dresdener Sensor-Symposium 1995  
Language
German
IFT  
Keyword(s)
  • gas sensor

  • heteropolysiloxane

  • humidity

  • IDC

  • interdigital capacitor

  • micro system technology

  • SAW

  • signal processing system

  • SO2

  • surface acoustic wave

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