2010
Conference Paper
Title

Rotatable target serial co-sputtering

Title Supplement
A new core technology for industrial large area glass coating?
Author(s)
Szyszka, B.
Pflug, A.
Sittinger, V.
Ulrich, S.
Vergöhl, M.
Werner, W.
Kaiser, A.
Jung, S.
Bringmann, U.
Bräuer, G.
Köhl, D.
Austgen, M.
Wuttig, M.
Weis, H.
Herwig, W.
Polle, A.
Herlitze, L.
Mainwork
Conference
Language
English