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  4. Influence of barrier and cap layer deposition on the properties of capped and non-capped porous silicon oxide
 
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2001
Journal Article
Title

Influence of barrier and cap layer deposition on the properties of capped and non-capped porous silicon oxide

Author(s)
Schulz, S.E.
Koerner, H.
Murray, C.
Streiter, I.
Gessner, T.
Journal
Microelectronic engineering  
DOI
10.1016/S0167-9317(00)00427-5
Language
English
Fraunhofer-Institut für Zuverlässigkeit und Mikrointegration IZM  
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