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Integration aspects of RF-MEMS technologies
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2005
Conference Paper
Title
Integration aspects of RF-MEMS technologies
Author(s)
Lisec, T.
Wagner, B.
Mainwork
13th European Gallium Arsenide and Other Compound Semiconductors Application Symposium. Conference proceedings
Conference
European Gallium Arsenide and Other Compound Semiconductors Application Symposium (GAAS) 2005
European Microwave Week (EuMW) 2005
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Link
Language
English
Fraunhofer-Institut für Siliziumtechnologie ISIT
