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Influence of gas on cutting silicon with solid state laser
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2004
Conference Paper
Title
Influence of gas on cutting silicon with solid state laser
Author(s)
Klotzbach, U.
Mälzer, S.
Kuntze, T.
Panzner, M.
Dötschel, M.
Sonntag, F.
Beyer, E.
Mainwork
Photon processing in microelectronics and photonics III
Conference
Conference "Photon Processing in Microelectronics and Photonics" 2004
DOI
10.1117/12.532133
Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS