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  4. Influence of gas on cutting silicon with solid state laser
 
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2004
Conference Paper
Title

Influence of gas on cutting silicon with solid state laser

Author(s)
Klotzbach, U.
Mälzer, S.
Kuntze, T.
Panzner, M.
Dötschel, M.
Sonntag, F.
Beyer, E.
Mainwork
Photon processing in microelectronics and photonics III  
Conference
Conference "Photon Processing in Microelectronics and Photonics" 2004  
DOI
10.1117/12.532133
Language
English
Fraunhofer-Institut für Werkstoff- und Strahltechnik IWS  
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